Research - SiGe grown by LEPECVD

Summary

I'm working on the LEPECVD system with Prof. Hans von Känel. It's a machine for growing silicon-germanium (SiGe) layers epitaxially on Si substrates at rates of up to 10nms-1. That's more than 10 times faster than most other growth systems.

I was at the Physics Department of the Eidgenössische Technische Hochschule Zürich (Hönggerberg) in the Laboratorium für Festkörperphysik (Laboratory for Solid State Physics) for a bit. Now I'm with him at the L-NESS, Politecnico di Milano in Como.

Publications

Publications featuring material made by the LEPECVD system, with the most recent first.

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Ge/SiGe Multiple Quantum Wells for Optical Applications
D. Chrastina, A. Neels, M. Bonfanti, M. Virgilio, G. Isella, E. Grilli, M. Guzzi, G. Grosso, H. Sigg, and H. von Känel
IEEE 5th Int. Conf. Group IV Photonics 194-196 (2008).

Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

High Speed Ge Photodetector Integrated on Silicon-on-Insulator Operating at Very Low Bias Voltage
Johann Osmond, Giovanni Isella, Daniel Chrastina, Rolf Kaufmann, and Hans von Känel
IEEE 5th Int. Conf. Group IV Photonics 164-166 (2008).

Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

SiGe/Si Quantum Cascade Structures Deposited by Low-Energy Plasma-Enhanced CVD
G. Isella, G. Matmon, A. Neels, E. Müller, M. Califano, D. Chrastina, H. von Känel, L. Lever, Z. Ikonić, R. W. Kelsall, and D. J. Paul
IEEE 5th Int. Conf. Group IV Photonics 29-31 (2008).

Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

Direct gap related optical transitions in Ge/SiGe quantum wells
M. Bonfanti, E. Grilli, M. Guzzi, D. Chrastina, G. Isella, H. von Känel, and H. Sigg
Physica E in press (2008).

This article may be found at http://dx.doi.org/10.1016/j.physe.2008.08.052.

Copyright © 2008 Elsevier Ltd.

Ge/Si (100) heterojunction photodiodes fabricated from material grown by low-energy plasma-enhanced chemical vapour deposition
Johann Osmond, Giovanni Isella, Daniel Chrastina, Rolf Kaufmann, and Hans von Känel
Thin Solid Films 517 (1) 380-382 (2008).

This article may be found at http://dx.doi.org/10.1016/j.tsf.2008.08.036.

Copyright © 2008 Elsevier Ltd.

Strained-Si modulation doped field effect transistors as detectors of terahertz and sub-terahertz radiation
S. L. Rumyantsev, K. Fobelets, D. Veksler, T. Hackbarth, and M. S. Shur
Semicond. Sci. Technol. 23 (10) 105001 (2008).

This article may be found at http://stacks.iop.org/SST/23/105001.

DOI: 10.1088/0268-1242/23/10/105001

Copyright © 2008 IOP Publishing Ltd.

Optical transitions in Ge/SiGe multiple quantum wells with Ge-rich barriers
M. Bonfanti, E. Grilli, M. Guzzi, M. Virgilio, G. Grosso, D. Chrastina, G. Isella, H. von Känel, and A. Neels
Phys. Rev. B 78 (4) 041407(R) (2008).

This article may be found at http://link.aps.org/abstract/PRB/v78/e041407.

DOI: 10.1103/PhysRevB.78.041407

Copyright © 2008 American Physical Society

Gate-controlled rectifying barrier in a two-dimensional hole gas
Roman Sordan, Alessio Miranda, Johann Osmond, Davide Colombo, Daniel Chrastina, Giovanni Isella, and Hans von Känel
Nanotechnology 19 (33) 335201 (2008).

This article may be found at http://stacks.iop.org/Nano/19/335201.

DOI: 10.1088/0957-4484/19/33/335201

Copyright © 2008 IOP Publishing Ltd.

An experimental and theoretical investigation of a magnetically confined dc plasma discharge
Maurizio Rondanini, Carlo Cavallotti, Daria Ricci, Daniel Chrastina, Giovanni Isella, Tamara Moiseev, and Hans von Känel
J Appl. Phys. 104 (01) 013304 (2008).

This article may be found at http://link.aip.org/link/?jap/104/013304.

DOI: 10.1063/1.2948927

Copyright © 2008 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

Nanostructures in silicon investigated by atomic force microscopy and surface photovoltage spectroscopy
A. Cavallini and D. Cavalcoli
Scanning 30 (4) 358-363 (2008).

This article may be found at http://dx.doi.org/10.1002/sca.20110.

Copyright © 2008 Wiley Periodicals, Inc.

Si/SiGe bound-to-continuum quantum cascade terahertz emitters
D. J. Paul, G. Matmon, L. Lever, Z. Ikonić, R. W. Kelsall, D. Chrastina, G. Isella, and H. von Känel
Proc. of SPIE 6996 69961C (2008).

This article may be found at http://link.aip.org/link/?psi/6996/69961C.

DOI: 10.1117/12.785529

Copyright © 2008 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

Phonon strain shift coefficients in Si1-xGex alloys
F. Pezzoli, E. Bonera, E. Grilli, M. Guzzi, S. Sanguinetti, D. Chrastina, G. Isella, H. von Känel, E. Wintersberger, J. Stangl and G. Bauer
J Appl. Phys. 103 (09) 093521 (2008).

This article may be found at http://link.aip.org/link/?jap/103/093521.

DOI: 10.1063/1.2913052

Copyright © 2008 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

SiGe wet chemical etchants with high compositional selectivity and low strain sensitivity
M. Stoffel, A. Malachias, T. Merdzhanova, F. Cavallo, G. Isella, D. Chrastina, H. von Känel, A. Rastelli and O. G. Schmidt
Semicond. Sci. Technol. 23 (8) 085021 (2008).

This article may be found at http://stacks.iop.org/SST/23/085021.

DOI: 10.1088/0268-1242/23/8/085021

Copyright © 2008 IOP Publishing Ltd.

Epitaxial Si-Ge Heterostructures and Nanostructures for Optical and Electrical Applications
H. von Känel, M. Bollani, M. Bonfanti, D. Chrastina, D. Colombo, A. Dommann, M. Guzzi, G. Isella, A. Miranda, E. Müller, A. Neels, J. Osmond, B. Rössner, R. Sordan, and F. Traversi.
Proceedings of the 2nd conference on Nanostructures, 11-14 March 2008.

 

Structural Homogeneity of nc-Si Films Grown by Low-Energy PECVD
A. Le Donne, S. Binetti, G. Isella and S. Pizzini
Electrochemical and Solid-State Letters 11 (6) P5-P7 (2008).

This article may be found at http://dx.doi.org/10.1149/1.2894906.

Copyright © 2008 The Electrochemical Society.

Structural characterization on nc-Si films grown by low-energy PECVD on different substrates
A. Le Donne, S. Binetti, G. Isella, B. Pichaud, M. Texier, M. Acciarri and S. Pizzini
Applied Surface Science 254 (9) 2804-2808 (2008).

This article may be found at http://dx.doi.org/10.1016/j.apsusc.2007.10.025.

Copyright © 2007 Elsevier Ltd.

Advances in structural characterization of thin film nanocrystalline silicon for photovoltaic applications
A. Le Donne, S. Binetti, G. Isella, B. Pichaud, M. Texier, M. Acciarri and S. Pizzini
Solid State Phenom. 131-133 33-38 (2008).

Copyright © 2007 Trans Tech Publications Ltd, Switzerland, www.ttp.net.

Hydrogenated nanocrystalline silicon thin films studied by scanning force microscopy
D. Cavalcoli, M. Rossi, A. Tomasi, A. Cavallini, D. Chrastina and G. Isella
Solid State Phenom. 131-133 547-552 (2008).

Copyright © 2007 Trans Tech Publications Ltd, Switzerland, www.ttp.net.

Defect analysis of hydrogenated nanocrystalline Si thin films
A. Cavallini, D. Cavalcoli, M. Rossi, A. Tomasi, S. Pizzini, D. Chrastina and G. Isella
Physica B 401-402 519-522 (2007).

This article may be found at http://dx.doi.org/10.1016/j.physb.2007.09.012.

Copyright © 2007 Elsevier Ltd.

Measurement of carrier lifetime and interface recombination velocity in Si-Ge waveguides
A. Trita, I. Cristiani, V. Degiorgio, D. Chrastina and H. von Känel
Appl. Phys. Lett. 91 (4) 041112 (2007).

This article may be found at http://link.aip.org/link/?apl/91/041112.

DOI: 10.1063/1.2760133

Copyright © 2007 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

Measurement of the lifetime of photo-generated free carriers in SiGe waveguides
A. Trita, I. Cristiani, V. Degiorgio, M. Döbeli, D. Chrastina and H. von Känel
J. Nonlinear Opt. Phys. 16 (2) 207-216 (2007).

This article may be found at http://dx.doi.org/10.1142/S0218863507003718.

Copyright © 2007 World Scientific

Analysis of strain relaxation by microcracks in epitaxial GaAs grown on Ge/Si substrates
D. Colombo, E. Grilli, M. Guzzi, S. Sanguinetti, S. Marchionna, M. Bonfanti, A. Fedorov, H. von Känel, G. Isella and E. Müller
J Appl. Phys. 101 (10) 103519 (2007).

This article may be found at http://link.aip.org/link/?jap/101/103519.

DOI: 10.1063/1.2729477

Copyright © 2007 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

Resonator fabrication for switchable two-color MIR detectors based on p-type SiGe quantum cascade injectors
M. Grydlik, P. Rauter, T. Fromherz, C. Falub, D. Gruetzmacher, G. Isella, and G. Bauer
AIP Conf. Proc. 893 1411-1412 (2007).

This article may be found at http://link.aip.org/link/?apc/893/1411.

DOI: 10.1063/1.2730433

Copyright © 2007 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

Modelling and measurements of the parasitic electrostatic capacitances in Si/SiGe n-HFET
N. Zerounian, M. Enciso-Aguilar, T. Hackbarth, H.-J. Herzog and F. Aniel
Solid State Electronics 51 (3) 449-459 (2007).

This article may be found at http://dx.doi.org/10.1016/j.sse.2007.01.027.

Copyright © 2007 Elsevier Ltd.

Effective mass measurement: the influence of hole band nonparabolicity in SiGe/Ge quantum wells
Benjamin Rössner, Hans von Känel, Daniel Chrastina, Giovanni Isella and Bertram Batlogg
Semicond. Sci. Technol. 22 (1) S191-S194 (2007).

This article may be found at http://stacks.iop.org/SST/22/S191.

DOI: 10.1088/0268-1242/22/1/S45

Copyright © 2006 IOP Publishing Ltd.

Erratum to “Raman spectroscopy of Si1-xGex epilayers”
F. Pezzoli, Lucio Martinelli, E. Grilli, M. Guzzi, S. Sanguinetti, M. Bollani, D. Chrastina, G. Isella, H. von Känel, E. Wintersberger, J. Stangl and G. Bauer
Mat. Sci. Eng. B 137 (1-3) 315 (2007).

This article may be found at http://dx.doi.org/10.1016/j.mseb.2006.02.057.

Copyright © 2007 Elsevier Ltd.

Heterojunction photodiodes fabricated from Ge/Si (100) layers grown by low-energy plasma-enhanced CVD
G. Isella, J. Osmond, M. Kummer, R. Kaufmann and H. von Känel
Semicond. Sci. Technol. 22 (1) S26-S28 (2007).

This article may be found at http://stacks.iop.org/SST/22/S26.

DOI: 10.1088/0268-1242/22/1/S06

Copyright © 2006 IOP Publishing Ltd.

Photocurrent and transmission spectroscopy of direct-gap interband transitions in Ge/SiGe quantum wells
S. Tsujino, H. Sigg, G. Mussler, D. Chrastina and H. von Känel
Appl. Phys. Lett. 89 (26) 262119 (2006).

This article may be found at http://link.aip.org/link/?apl/89/262119.

DOI: 10.1063/1.2425032

Copyright © 2006 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

Strain-induced shift of phonon modes in Si1-xGex alloys
F. Pezzoli, E. Grilli, M. Guzzi, S. Sanguinetti, D. Chrastina, G. Isella, H. von Känel, E. Wintersberger, J. Stangl and G. Bauer
Mat. Sci. Semicond. Process. 9 (4-5) 541-545 (2006).

This article may be found at http://dx.doi.org/10.1016/j.mssp.2006.08.046.

Copyright © 2006 Elsevier Ltd.

Hole band nonparabolicity and effective mass measurement in p-SiGe/Ge heterostructures
Benjamin Rössner, Bertram Batlogg, Hans von Känel, Daniel Chrastina and Giovanni Isella
Mat. Sci. Semicond. Process. 9 (4-5) 777-780 (2006).

This article may be found at http://dx.doi.org/10.1016/j.mssp.2006.08.022.

Copyright © 2006 Elsevier Ltd.

Electron-beam-induced current imaging for the characterisation of structural defects in Si1-xGex films grown by LE-PECVD
A. Virtuani, S. Marchionna, M. Acciarri, G. Isella and H. von Kaenel
Mat. Sci. Semicond. Process. 9 (4-5) 798-801 (2006).

This article may be found at http://dx.doi.org/10.1016/j.mssp.2006.08.064.

Copyright © 2006 Elsevier Ltd.

Defect imaging of SiGe strain relaxed buffers grown by LEPECVD
S. Marchionna, A. Virtuani, M. Acciarri, G. Isella and H. von Kaenel
Mat. Sci. Semicond. Process. 9 (4-5) 802-805 (2006).

This article may be found at http://dx.doi.org/10.1016/j.mssp.2006.09.003.

Copyright © 2006 Elsevier Ltd.

Study of thermal strain relaxation in GaAs grown on Ge/Si substrates
D. Colombo, E. Grilli, M. Guzzi, S. Sanguinetti, A. Fedorov, H. von Känel and G. Isella
J. Luminescence 121 (2) 375-378 (2006).

This article may be found at http://dx.doi.org/10.1016/j.jlumin.2006.08.027.

Copyright © 2006 Elsevier Ltd.

Nanocrystalline silicon films as multifunctional material for optoelectronic and photovoltaic applications
S. Pizzini, M. Acciarri, S. Binetti, D. Cavalcoli, A. Cavallini, D. Chrastina, L. Colombo, E. Grilli, G. Isella, M. Lancin, A. Le Donne, A. Mattoni, K. Peter, B. Pichaud, E. Poliani, M. Rossi, S. Sanguinetti, M. Texier and H. von Känel
Mat. Sci. Eng. B 134 (2-3) 118-124 (2006).

This article may be found at http://dx.doi.org/10.1016/j.mseb.2006.06.038.

Copyright © 2006 Elsevier Ltd.

Logic gates with a single Hall bar heterostructure
R. Sordan, A. Miranda, J. Osmond, D. Chrastina, G. Isella and H. von Känel
Appl. Phys. Lett. 89 (15) 152122 (2006).

This article may be found at http://link.aip.org/link/?apl/89/152122.

DOI: 10.1063/1.2362989

Copyright © 2006 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

Weak localization and charge-carrier interaction effects in a two-dimensional hole gas in a germanium quantum well in a SiGe/Ge/SiGe heterostructure
I. B. Berkutov, Yu. F. Komnik, V. V. Andrievskii, O. A. Mironov, M. Myronov and D. R. Leadley
Low Temp. Phys. 32 (7) 683-688 (2006).

This article may be found at http://link.aip.org/link/?ltp/32/683.

DOI: 10.1063/1.2216282

Copyright © 2006 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

2-D hole gas with two-subband occupation in a strained Ge channel: Scattering mechanisms
Benjamin Rössner, Hans von Känel, Daniel Chrastina, Giovanni Isella and Bertram Batlogg
Thin Solid Films 508 (1-2) 351-354 (2006).

This article may be found at http://dx.doi.org/10.1016/j.tsf.2005.07.341.

Copyright © 2005 Elsevier Ltd.

Characterization of Ge-on-Si virtual substrates and single junction GaAs solar cells
R. Ginige, B. Corbett, M. Modreanu, C. Barrett, J. Hilgarth, G. Isella, D. Chrastina and H. von Känel
Semicond. Sci. Technol. 21 (6) 775-780 (2006).

This article may be found at http://stacks.iop.org/SST/21/775.

DOI: 10.1088/0268-1242/21/6/011

Copyright © 2006 IOP Publishing Ltd.

Microwave Noise Performance and Modeling of SiGe-Based HFETs
Mauro Enciso Aguilar, Paul Crozat, Thomas Hackbarth, Hans-Joest Herzog and Frédéric Aniel
IEEE Trans. Electron. Devices 52 (11) 2409-2415 (2005).

This article may be found at http://ieeexplore.ieee.org/.

DOI: 10.1109/TED.2005.857170

Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

X-Ray Investigation of Thick Epitaxial GaAs/InGaAs Layers on Ge Pseudosubstrates
A. Rehman Khan, K. Mundboth, J. Stangl, G. Bauer, H. von Känel, A. Fedorov, G. Isella and D. Colombo
IEEE International Conference on Emerging Technologies 323-328 (2005).

This article may be found at http://ieeexplore.ieee.org/.

Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

Electron-electron interaction in p-SiGe/Ge quantum wells
Benjamin Rössner, Hans von Känel, Daniel Chrastina, Giovanni Isella and Bertram Batlogg
Mat. Sci. Eng. B 124-125 184-187 (2005).

This article may be found at http://dx.doi.org/10.1016/j.mseb.2005.08.037.

Copyright © 2005 Elsevier Ltd.

Raman spectroscopy of Si1-xGex epilayers
F. Pezzoli, Lucio Martinelli, E. Grilli, M. Guzzi, S. Sanguinetti, M. Bollani, D. Chrastina, G. Isella, H. von Känel, E. Wintersberger, J. Stangl and G. Bauer
Mat. Sci. Eng. B 124-125 127-131 (2005).

This article may be found at http://dx.doi.org/10.1016/j.mseb.2005.08.057.

Copyright © 2005 Elsevier Ltd.

InGaAs/GaAs sources monolithically grown by MOVPE on Ge/Si substrates
I. Sagnes, Y. Chriqui, G. Saint-Girons, S. Bouchoule, D. Bensahel, O. Kermarrec, G. Isella and H. von Kaenel
Second IEEE International Conference on Group IV Photonics 207-209 (2005).

This article may be found at http://ieeexplore.ieee.org/.

Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

LEPECVD - a Production Technique for SiGe MOSFETs and MODFETs
D. Chrastina, B. Rössner, G. Isella, H. von Känel, J. P. Hague, T. Hackbarth, H.-J. Herzog, K.-H. Hieber and U. König
in Ehrenfried Zschech, Caroline Whelan and Thomas Mikolajick (editors), Materials for Information Technology 16-28 (2005).

Copyright © 2005 Springer

SJ and TJ GaAs concentrator solar cells on Si virtual wafers
G. Gabetta, C. Flores, R. Campesato, C. Casale, G. Timó, G. Smekens, J. Vanbegin, H. von Kanel and G. Isella
Conference Record of the Thirty-first IEEE Photovoltaic Specialists Conference 850-853 (2005).

This article may be found at http://ieeexplore.ieee.org/.

Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

Nanocrystalline silicon film grown by Low Energy Plasma Enhanced Chemical Vapor Deposition for optoelectronic applications
S. Binetti, M. Acciarri, M. Bollani, L. Fumagalli, H. von Känel and S. Pizzini
Thin Solid Films 487 (1-2) 19-25 (2005).

This article may be found at http://dx.doi.org/10.1016/j.tsf.2005.01.028.

Copyright © 2005 Elsevier Ltd.

Thin relaxed SiGe virtual substrates grown by low-energy plasma-enhanced chemical vapor deposition
D. Chrastina, G. Isella, M. Bollani, B. Rössner, E. Müller, T. Hackbarth, E. Wintersberger, Z. Zhong, J. Stangl and H. von Känel
J. Cryst. Growth 281 (2-4) 281-289 (2005).

This article may be found at http://dx.doi.org/10.1016/j.jcrysgro.2005.04.040.

Copyright © 2005 Elsevier Ltd.

Nanocrystalline silicon film grown by LEPECVD for photovoltaic applications
M. Acciarri, S. Binetti, M. Bollani, A. Comotti, L. Fumagalli, S. Pizzini and H. von Känel
Solar Energy Materials & Solar Cells 87 (1-4) 11-24 (2005).

This article may be found at http://dx.doi.org/10.1016/j.solmat.2004.09.012.

Copyright © 2005 Elsevier Ltd.

Investigation of the injection velocity of holes in strained Si pMOSFETs
G. Nicholas, T. J. Grasby, E. H. C. Parker, T. E. Whall, D. J. Paul, A. G. R. Evans and H. von Känel
Semicond. Sci. Technol. 20 (5) L20-L22 (2005).

This article may be found at http://stacks.iop.org/0268-1242/20/L20.

DOI: 10.1088/0268-1242/20/5/L02

Copyright © 2005 Institute of Physics.

Fe thin films grown on single-crystal and virtual Ge(001) substrates
M. Cantoni, M. Riva, G. Isella, R. Bertacco and F. Ciccacci
J. Appl. Phys. 97 (9) 093906 (2005).

This article may be found at http://link.aip.org/link/?jap/97/093906.

DOI: 10.1063/1.1887836

Copyright © 2005 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

Long wavelength room temperature laser operation of a strained InGaAs/GaAs quantum well structure monolithically grown by metalorganic chemical vapour deposition on a low energy-plasma enhanced chemical vapour deposition graded misoriented Ge/Si virtual substrate
Y. Chriqui, G. Saint-Girons, G. Isella, H. von Kaenel, S. Bouchoule and I. Sagnes
Optical Materials 27 (5) 846-850 (2005).

This article may be found at http://dx.doi.org/10.1016/j.optmat.2004.08.022.

Copyright © 2005 Elsevier Ltd.

Stability of shuffle and glide dislocation segments with increasing misfit in Ge/Si1-xGex(001) epitaxial layers
A. Marzegalli, F. Montalenti and Leo Miglio
Appl. Phys. Lett. 86 (4) 041912 (2005).

This article may be found at http://link.aip.org/link/?apl/86/041912.

DOI: 10.1063/1.1856145

Copyright © 2005 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

Comment on “Smooth relaxed Si0.75Ge0.25 layers on Si(001) via in situ rapid thermal annealing” [Appl. Phys. Lett. 83, 4321 (2003)]
D. Chrastina
Appl. Phys. Lett. 85 (22) 5469 (2004).

This article may be found at http://link.aip.org/link/?apl/85/5469.

DOI: 10.1063/1.1828574

Copyright © 2004 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

High mobility SiGe heterostructures fabricated by low-energy plasma-enhanced chemical vapor deposition
H. von Känel, D. Chrastina, B. Rössner, G. Isella, J. P. Hague and M. Bollani
Microelectronic Engineering 76 (1-4) 278-283 (2004).

This article may be found at http://dx.doi.org/10.1016/j.mee.2004.07.029.

Copyright © 2004 Elsevier Ltd.

Relaxed SiGe heteroepitaxy on Si with very thin buffer layers: experimental LEPECVD indications and an interpretation based on strain-dependent dislocation nature
A. Marzegalli, F. Montalenti, M. Bollani, Leo Miglio, G. Isella, D. Chrastina and H. von Känel
Microelectronic Engineering 76 (1-4) 289-295 (2004).

This article may be found at http://dx.doi.org/10.1016/j.mee.2004.07.031.

Copyright © 2004 Elsevier Ltd.

High quality SiGe electronic material grown by low energy plasma enhanced chemical vapour deposition
D. Chrastina, G. Isella, B. Rössner, M. Bollani, E. Müller, T. Hackbarth and H. von Känel
Thin Solid Films 459 (1-2) 37-40 (2004).

This article may be found at http://dx.doi.org/10.1016/j.tsf.2003.12.090.

(As featured at PhysOrg.com.)

Copyright © 2004 Elsevier Ltd.

Ge quantification of high Ge content relaxed buffer layers by RBS and SIMS
F. Sánchez-Almazán, E. Napolitani, A. Carnera, A. V. Drigo, M. Berti, J. Stangl, Z Zhong, G Bauer, G. Isella, and H. von Känel
Nuclear Instruments and Methods in Physics Research B 226 (3) 301-308 (2004).

This article may be found at http://dx.doi.org/10.1016/j.nimb.2004.06.030.

Copyright © 2004 Elsevier Ltd.

Matrix effects in SIMS depth profiles of SiGe relaxed buffer layers
F. Sánchez-Almazán, E. Napolitani, A. Carnera, A. V. Drigo, G. Isella, H. von Känel and M. Berti
Applied Surface Science 231-232 704-707 (2004).

This article may be found at http://dx.doi.org/10.1016/j.apsusc.2004.03.193.

Copyright © 2004 Elsevier Ltd.

Low-energy plasma-enhanced chemical vapor deposition for strained Si and Ge heterostructures and devices
G. Isella, D. Chrastina, B. Rössner, T. Hackbarth, H.-J. Herzog, U. König and H. von Känel
Solid State Electronics 48 (8) 1317-1323 (2004).

This article may be found at http://dx.doi.org/10.1016/j.sse.2004.01.013.

Copyright © 2004 Elsevier Ltd.

Strained Si HFETs for microwave applications: state-of-the-art and further approaches
M. Enciso Aguilar, M. Rodriguez, N. Zerounian, F. Aniel, T. Hackbarth, H.-J. Herzog, U. König, S. Mantl, B. Holländer, D. Chrastina, G. Isella, H. von Känel, K. Lyutovich, M. Oehme
Solid State Electronics 48 (8) 1443-1452 (2004).

This article may be found at http://dx.doi.org/10.1016/j.sse.2004.01.021.

Copyright © 2004 Elsevier Ltd.

Scattering mechanisms in high-mobility strained Ge channels
B. Rössner, D. Chrastina, G. Isella and H. von Känel
Appl. Phys. Lett. 84 (16) 3058-3060 (2004).

This article may be found at http://link.aip.org/link/?apl/84/3058.

DOI: 10.1063/1.1707223

Copyright © 2004 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

Formation of strain-induced Si-rich and Ge-rich nanowires at misfit dislocations in SiGe: A model supported by photoluminescence data
Lucio Martinelli, A. Marzegalli, P. Raiteri, M. Bollani, F. Montalenti, Leo Miglio, D. Chrastina, G. Isella and H. von Känel
Appl. Phys. Lett. 84 (15) 2895-2897 (2004).

This article may be found at http://link.aip.org/link/?apl/84/2895.

DOI: 10.1063/1.1705727

Copyright © 2004 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

Dislocation density and structure in Si1-xGex buffer layers deposited by LEPECVD
M. Bollani, E. Müller, G. Isella, S. Signoretti, D. Chrastina and H. von Känel
Microscopy of Semiconducting Materials 2003: Inst. Phys. Conf. Ser. No 180 247-250 (2004).

Copyright © 2003 IOP Publishing Ltd

Reduced self-heating in Si/SiGe field-effect transistors on thin virtual substrates prepared by low-energy plasma-enhanced chemical vapor deposition
T. Hackbarth, H.-J. Herzog, K.-H. Hieber, U. König, M. Bollani, D. Chrastina and H. von Känel
Appl. Phys. Lett. 83 (26) 5464-5466 (2003).

This article may be found at http://link.aip.org/link/?apl/83/5464.

(As featured at PhysOrg.com.)

DOI: 10.1063/1.1636820

Copyright © 2003 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

Room temperature laser operation of strained InGaAs/GaAs QW structure monolithically grown by MOCVD on LE-PECVD Ge/Si virtual substrate
Y. Chriqui, G. Saint-Girons, S. Bouchoule, J.-M. Moison, G. Isella, H. von Kaenel and I. Sagnes
Electron. Lett. 39 (23) 1658-1660 (2003).

This article may be found at http://ieeexplore.ieee.org/.

DOI: 10.1049/el:20030926

Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

Structural Characterization of Thick, High-Quality Epitaxial Ge on Si Substrates Grown by Low-Energy Plasma-Enhanced Chemical Vapor Deposition
Shawn G. Thomas, Sushil Bharatan, Robert E. Jones, Rainer Thoma, Thomas Zirkle, N. V. Edwards, Ran Liu, Xiang Dong Wang, Qianghua Xie, Carsten Rosenblad, Juergen Ramm, Giovanni Isella, and Hans von Känel
J. Electron. Mater. 32 (9) 976-980 (2003).

This article is available through http://www.tms.org/TMSHome.html

32 GHz MMIC distributed amplifier based on n-channel SiGe MODFETs
P. Abele, M. Zeuner, I. Kallfass, J. Müller, H. L. Hiwilepo, T. Hackbarth, D. Chrastina, H. von Känel, U. König, and H. Schumacher
Electron. Lett. 39 (20) 1448-1449 (2003).

This article may be found at http://ieeexplore.ieee.org/.

DOI: 10.1049/el:20030953

Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

Compressively strained Ge channels on relaxed SiGe buffer layers
M. Bollani, E. Müller, S. Signoretti, C. Beeli, G. Isella, M. Kummer and H. von Känel
Mat. Sci. Eng. B 101 (1-3) 102-105 (2003).

This article may be found at http://dx.doi.org/10.1016/S0921-5107(02)00662-1.

Copyright © 2003 Elsevier Ltd.

Effective mass in remotely doped Ge quantum wells
Benjamin Rößner, Giovanni Isella and Hans von Känel
Appl. Phys. Lett. 82 (5) 754-756 (2003).

This article may be found at http://link.aip.org/link/?apl/82/754.

DOI: 10.1063/1.1541101

Copyright © 2003 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

DC and high frequency performance of 0.1μm n-type Si/Si0.6Ge0.4 MODFET with fMAX=188GHz at 300K and fMAX=230GHz at 50K
M. Enciso-Aguilar, F. Aniel, P. Crozat, R. Adde, H.-J. Herzog, T. Hackbarth, U. König and H. von Känel
Electron. Lett. 39 (1) 149-151 (2003).

This article may be found at http://ieeexplore.ieee.org/.

DOI: 10.1049/el:20031182 (?)

Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

Fabrication and Modeling of Gigahertz Photodetectors in Heteroepitaxial Ge-on-Si Using a Graded Buffer Layer Deposited by Low Energy Plasma Enhanced CVD
R. E. Jones, S. G. Thomas, S. Bharatan, R. Thoma, C. Jasper, T. Zirkle, N. V. Edwards, R. Liu, X. D. Wang, Q. Xie, C. Rosenblad, J. Ramm, G. Isella, H. von Känel, J. Oh, and J. C. Campbell
Electron Devices Meeting (IEDM) 2002 793-796.

This article may be found at http://ieeexplore.ieee.org/.

DOI: 10.1109/IEDM.2002.1175957

Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

Posters

Effective Mass Measurement: Influence of Hole Band Nonparabolicity in SiGe/Ge Quantum wells
Benjamin Rössner, Hans von Känel, Daniel Chrastina, Giovanni Isella and Bertram Batlogg
ISTDM 2006, Princeton, USA, May 2006.
Electron-electron interaction in p-SiGe/Ge quantum wells
B. Rössner, H. von Känel, D. Chrastina, G. Isella and B. Batlogg
EMRS Spring, Strasbourg, France, June 2005.
2-D Hole Gas with Two-Subband occupation in a Strained Ge Channel
B. Rössner, H. von Känel, D. Chrastina, G. Isella and B. Batlogg
ICSI-4, Awaji Island, Hyogo, Japan, May 2005.
Temperature dependent mobility spectra in SiGe heterostructures
Daniel Chrastina, James P. Hague, Giovanni Isella, Benjamin Rößner, and Hans von Känel
INFM Si workshop, Genova, Italy, February 2003.

PhD

My PhD. thesis was in semiconductor physics. Originally, I was working on some coupled 2-dimensional electron and hole gas systems. My supervisor was Dr. David R. Leadley.

The devices were silicon-germanium heterostructures, designed by Dr. John Emeleus who left Warwick and went to Glasgow in February 1997.

Also, I've worked on some p-channel HMOSFET devices which were fabricated by Siemens. This work involved some device simulation. I worked on another p-channel system looking at weak localization and the Quantum Hall - Insulator transition. I worked on an n-channel system with Ryan Ferguson of Imperial College, and I ended up developing a new method of mobility spectrum analysis, based on Bryan's Algorithm Maximum Entropy, with Jim Hague which we have written up into a paper:

Application of Bryan's algorithm to the mobility spectrum analysis of semiconductor devices
D. Chrastina, J. P. Hague and D. R. Leadley
J. Appl. Phys. 94 (10) 6583-6590 (2003).

This article may be found at http://link.aip.org/link/?jap/94/6583.

DOI: 10.1063/1.1621719

Copyright © 2003 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

(See also the cond-mat version.)

I was EPSRC funded.

Opinions expressed on these pages are subject to change without notice. They do not necessarily reflect the views of anyone.

Resources


Anyway, here are some science/physics/whatever web sites for your perusal.



Copyright © 2004-2008 Danny Chrastina

Last updated: 10th November 2008

Email: danny at chrastina dot net

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